Products

LayTec’s product portfolio covers all areas of thin film and semiconductor process monitoring and control and offers all required solutions from one source: in-situ, in-line, stand-alone and mapping metrology. This enables complete integration and smooth communication of the metrology components with each other and with the process equipment. We make it easy to assess product quality at every step of the production process. Our modular technology platform offers the best-in-class metrology solution for your specific needs:

Connected metrology In-situ Metrology Deposition In-situ Metrology Etch Mapping In-line Metrology Service

"Epi to Etch" - get full control of your frontend processes! The LayTec Connected Metrology^® ecosystem enables improved process control characterizing complex layer stacks along the manufacturing chain. In a typical frontend production line, wafers are measured 3 or more times by LayTec products.

Downloads

Name	Size
EpiX data sheet	3.32 MB
Talk - Connected metrology characterizing complex layer stacks	4.36 MB
Talk - UV-vis reflectance mapping of nitride-based device structures	4.12 MB
EpiX GaN-power flyer	1.62 MB
EpiX VCSEL flyer	1.58 MB
Talk - Connected metrology at mp future days	4.36 MB
Talk - UV-vis reflectance mapping of nitride based device structures	4.12 MB
Enhancements in endpoint detection: Interview Oxford Instruments & LayTec	592.84 KB
EpiX^® product configuration overview	1.74 MB
Talk - SPIE 2026 Advances and new trends in in-situ and connected metrology	3.38 MB

In-situ Metrology Deposition

In-situ metrology systems are attached to deposition systems on one or several view ports and observe the formation of the thin film throughout the thin film deposition process in real time.

EpiTT

Combine measurements of temperature and
reflectance at three wavelengths in one tool.

EpiCurve^® TT

Combine wafer curvature measurements with emissivity-corrected pyrometry and growth rate/thickness measurements by three-wavelength reflectance.

Pyro 400

Our dedicated solution for GaN-based epitaxy on transparent substrates as well as on silicon.

LayTec's AbsoluT for precise simulated temperature for on-site temperature calibration of LayTec's EpiTT and EpiCurve® TT

AbsoluT

AbsoluT provides a precise simulated temperature for on-site temperature calibration of LayTec's EpiTT and EpiCurve^® TT.

InspiRe

LayTec’s spectral in-situ monitoring tool for various compound semiconductors such as perovskites and CIGS.

PearL and t-PearL

PearL and t-PearL for room temperature deposition processes.

EpiNet^® Software

Our software for control, analysis and optimization of epitaxial processes.

EpiRAS^® TT

EpiRAS^® TT is a multipurpose in-situ monitor of epitaxial growth of cubic semiconductors.

In-situ Metrology Etch

In-situ metrology systems are attached to deposition systems on one or several viewports for monitoring the progression of the etch dept during the process in real time. No matter if the required stop depth lies within a layer or at an interface.

TRIton^®

Our reflectometer for obtaining fully automated end point detection (EPD) during plasma etching processes.

Etchpoint

Etchpoint is the fully integrated end point detection (EPD) solution for Oxford Instruments Plasma Technologies’ proprietary PlasmaPro 100 Atomic Layer Etch for for GaN power electronics & RF applications.

NEPtune

Multi-wavelength reflectometer especially designed for wet etching in BEOL processing.

Mapping

Mapping metrology systems allow extending the inspection area of a wafer, substrate or module to the full device area in order to assess quality on 100% of the relevant area with the option to correlate to in-line or in-situ results via our Connected Metrology approach.

EpiX^®

Comprehensive 2D analysis of optical wafer properties by non-contact measurements.

X Link^® off-line

X Link^® enables fast, automated, non-destructive and accurate evaluation of the level of EVA or polyolefin cross-linking in PV module encapsulation processes.

PVScanner

Verification of bill of materials for PV modules in the palm of your hand.

In-line Metrology

In-line metrology systems are integrated into production lines for comprehensive process control during substrate transfer between deposition chambers.

ILMetro

Comprehensive control of industrial thin-film production processes by multiple non-contact measurements.

X Link^® in-line

X Link^® enables fast, automated, non-destructive and accurate evaluation of the level of EVA or polyolefin cross-linking in PV module encapsulation processes.

PearL and t-PearL

Comprehensive photoluminescence characterization of compound semiconductor thin-films.

Flames

In-line monitoring multi-layer thin-film structures in large area processes by means of spectral reflectance

Service & Support

The LayTec Application and Support Team

The LayTec Application and Support Team takes care of initial installations, warranty issues and follow-up services. For our customers, we also offer training sessions, preventive maintenance visits and calibration services to ensure the maximum performance of our metrology products.

We offer:

Webinars
Maintenance trainings
Advanced data analysis training
Tutorials
Support agreements

For more info and price quotes, please contact: sales@laytec.de

Contact

We look forward to hearing from you and will try to answer your questions or respond to your message as best we can. Please use one of the following contact options.

infolaytec.de +49 30 8900550

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