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700
International Compressor Engineering Conference
Development of a Scroll-Type Oil-Free Vacuum Pump
Key
147
Conference Year
1990
Authors
T. Kushiro
,
Shin Meiwa Industry Co.
K. Miyazaki
,
Shin Meiwa Industry Co.
H. Kataoka
,
Shin Meiwa Industry Co.
S. Nii
,
Shin Meiwa Industry Co.
S. Machida
,
Hitachi
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