Tescan Amber X 2

The TESCAN Amber X2 system is a Xe-Plasma FIB that enables the modification of samples with a Xe-Plasma. Significantly higher ablation rates are possible compared to conventional focused ion beam systems with a gallium beam.

Configuration

• Operation Voltage:

  • High Tension SEM: 50 V - 30 kV

  • High Tension FIB: 500 V - 30 kV      

• Source

  • FEG (Schottky)

  • Xenon Plasma Source

• Imaging Detectors:

  • chamber SE

  • in-column axial BSE/SE (Axial)

  • in-column energy-filtered multidetector (MD)

  • SITD

  • Retractable LE-BSE detector with shutter

• Gas Injection System (GIS)

  • GIS (W)

  • GIS (C)

• Manipulators

  • Omniprobe 400 with independent x,y, z motion and rotation 

  • Tescan OptiLift piezo controlled with motorized concentric rotation

• Analysis

  • 4D-STEM in SEM pixelated detector

Resolution

Imaging, Analysis and Sample Preparation Techniques      

• SE & BSE SEM analysis

• STEM imaging

• 4D-STEM in SEM

• 3D Slice & View tomography

• TEM sample preparation

• Nanoscale deposition and contacting