Abstract
Many processes are composed of Bays with equipments. Most 300mm wafer lines use AMHS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stockers, whereas intra-bay AMHS moves lots between stockers and tools, or between tools within the same bay. Most companies are trying to reduce average cycle time to increase productivity and delivery time. In this paper, we proposed simulation process standardization method in 300mm FAB semiconductor manufacturing process to propose simulation model verification method. Also we tried to prove efficiency of adopting the simulation theory in real production line.
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Park, D., Han, Y., Lee, C. (2006). Optimization of a Simulation for 300mm FAB Semiconductor Manufacturing. In: Gavrilova, M.L., et al. Computational Science and Its Applications - ICCSA 2006. ICCSA 2006. Lecture Notes in Computer Science, vol 3984. Springer, Berlin, Heidelberg. https://doi.org/10.1007/11751649_28
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DOI: https://doi.org/10.1007/11751649_28
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-34079-9
Online ISBN: 978-3-540-34080-5
eBook Packages: Computer ScienceComputer Science (R0)Springer Nature Proceedings Computer Science
Keywords
- Semiconductor Industry
- Simulation Theory
- Wafer Fabrication
- Manufacturing Execution System
- Line Automation
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.