Elmar Bach Richard Gaggl Luca Sant Cesare Buffa Snezana Stojanovic Dietmar Straeussnigg Andreas Wiesbauer 9.5 A 1.8V true-differential 140dB SPL full-scale standard CMOS MEMS digital microphone exhibiting 67dB SNR. 166-167 2017 ISSCC https://doi.org/10.1109/ISSCC.2017.7870313 conf/isscc/2017 db/conf/isscc/isscc2017.html#BachGSBSSW17