Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations.

FaJun Yang Naiqi Wu Rong Su 0001 Yan Qiao 0004 Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations. 241-246 2018 CASE https://doi.org/10.1109/COASE.2018.8560461 conf/case/2018 db/conf/case/case2018.html#YangWSQ18