Interconnect fabrication processes and the development of low-cost wiring for CMOS products.

Thomas J. Licata Evan G. Colgan James M. E. Harper Stephen E. Luce Interconnect fabrication processes and the development of low-cost wiring for CMOS products. 419-436 1995 39 IBM J. Res. Dev. 4 db/journals/ibmrd/ibmrd39.html#LicataCHL95 https://doi.org/10.1147/rd.394.0419