Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films.

Shou-Yi Kuo Kou-Chen Liu Fang-I Lai Jui-Fu Yang Wei-Chun Chen Ming-Yang Hsieh Hsin-I Lin Woei-Tyng Lin Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films. 730-733 2010 50 Microelectron. Reliab. 5 https://doi.org/10.1016/j.microrel.2010.01.042 db/journals/mr/mr50.html#KuoLLYCHLL10