Breakthrough Processes for Si CMOS Devices with BEOL Compatibility for 3D Sequential Integrated more than Moore Analog Applications.

M. De Souza Daphnée Bosch Abygaël Viey Tadeu Mota Frutuoso P. Lheritier C. Licitra Nada Zerhouni A. Albouy Laurent Brunet A. Magalhaes-Lucas L. M. B. da Silva H. Boutry M. Husien Fahmy Taha Abdelrahman F. Cristiano R. Gassilloud M. Ribotta G. Romano William Vandendaele V. Benevent Mathieu Opprecht S. Kerdilès F. Milesi F. Mazen Benoit Sklénard C. Euvrard-Colnat Johannes Sturm Amélie Lambert C. Candebage L. Laraignou François Boulard A. Sarrazin M. De Souza Christoforos G. Theodorou Xavier Garros Perrine Batude Breakthrough Processes for Si CMOS Devices with BEOL Compatibility for 3D Sequential Integrated more than Moore Analog Applications. 1-2 2024 VLSI Technology and Circuits https://doi.org/10.1109/VLSITechnologyandCir46783.2024.10631398 conf/vlsit/2024 db/conf/vlsit/vlsit2024.html#BoschVFLLZABMSB24 M. Husien Fahmy Taha Abdelrahman A. Albouy Perrine Batude V. Benevent Daphnée Bosch François Boulard H. Boutry Laurent Brunet C. Candebage F. Cristiano C. Euvrard-Colnat Tadeu Mota Frutuoso Xavier Garros R. Gassilloud Sébastien KerdilèsS. Kerdilès Amélie Lambert L. Laraignou P. Lheritier C. Licitra A. Magalhaes-Lucas F. Mazen F. Milesi Mathieu Opprecht M. Ribotta G. Romano A. Sarrazin L. M. B. da Silva Benoit Sklénard Johannes Sturm Christoforos G. Theodorou William Vandendaele Abygaël Viey Nada Zerhouni