Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnect.

Sebastian Orellana Brice Arrazat Pascal Fornara Christian Rivero Sylvain Blayac Pierre Montmitonnet Karim Inal Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnect. 1896-1900 2015 55 Microelectron. Reliab. 9-10 https://doi.org/10.1016/j.microrel.2015.06.032 db/journals/mr/mr55.html#OrellanaAFRBMI15