3D interconnection using copper direct hybrid bonding for GaN on silicon wafer.

Nicolas Bresson Christophe Dubarry Lucile Arnaud Maria-Luisa Calvo-Muñoz Gaëlle Mauguen Stéphane Moreau R. Crochemore Nicolas Bresson Bernard Aventurier 3D interconnection using copper direct hybrid bonding for GaN on silicon wafer. 1-4 2021 3DIC https://doi.org/10.1109/3DIC52383.2021.9687599 conf/3dic/2021 db/conf/3dic/3dic2021.html#DubarryAMMMCBA21 Emilie Bourjot Paul Stewart Christophe Dubarry E. Lagoutte E. Rolland Nicolas Bresson G. Romano D. Scevola Viorel Balan Jérôme Dechamp Marc Zussy Gaëlle Mauguen Clément Castan Loïc Sanchez Amadine Jouve Frank Fournel Séverine Cheramy Towards a Complete Direct Hybrid Bonding D2W Integration Flow: Known-Good-Dies and Die Planarization Modules Development. 1-5 2019 3DIC https://doi.org/10.1109/3DIC48104.2019.9058783 conf/3dic/2019 db/conf/3dic/3dic2019.html#BourjotSDLRBRSB19 Amadine Jouve Loïc Sanchez Clément Castan Nicolas Bresson Frank Fournel Nicolas Raynaud Pascal Metzger Die to Wafer Direct Hybid Bonding Demonstration with High Alignment Accuracy and Electrical Yields. 1-7 2019 3DIC https://doi.org/10.1109/3DIC48104.2019.9058905 conf/3dic/2019 db/conf/3dic/3dic2019.html#JouveSCBFRM19 Lucile Arnaud Stéphane Moreau Amadine Jouve Imed Jani Didier Lattard Frank Fournel C. Euvrard Y. Exbrayat Viorel Balan Nicolas Bresson S. Lhostis J. Jourdon E. Deloffre S. Guillaumet Alexis Farcy Simon Gousseau M. Arnoux Fine pitch 3D interconnections with hybrid bonding technology: From process robustness to reliability. 4 2018 IRPS https://doi.org/10.1109/IRPS.2018.8353591 conf/irps/2018 db/conf/irps/irps2018.html#ArnaudMJJLFEEBB18 Didier Lattard Lucile Arnaud Arnaud Garnier Nicolas Bresson Franck Bana R. Segaud Amadine Jouve H. Jacquinot Stéphane Moreau Karim Azizi-Mourier C. Chantre Pascal Vivet Gaël Pillonnet F. Casset F. Ponthenier Alexis Farcy S. Lhostis Jean Michailos Alexandre Arriordaz Séverine Cheramy ITAC: A complete 3D integration test platform. 1-4 2016 3DIC https://doi.org/10.1109/3DIC.2016.7970012 conf/3dic/2016 db/conf/3dic/3dic2016.html#LattardAGBBSJJM16 Lucile Arnaud M. Arnoux Alexandre Arriordaz Bernard Aventurier Karim Azizi-Mourier Viorel Balan Franck Bana Emilie Bourjot Maria-Luisa Calvo-Muñoz F. Casset Clément Castan C. Chantre Séverine Cheramy R. Crochemore Jérôme Dechamp E. Deloffre Christophe Dubarry C. Euvrard Y. Exbrayat Alexis Farcy Frank Fournel Arnaud Garnier Simon Gousseau S. Guillaumet H. Jacquinot Imed Jani J. Jourdon Amadine Jouve E. Lagoutte Didier Lattard S. Lhostis Gaëlle Mauguen Pascal Metzger Jean Michailos Stéphane Moreau Gaël Pillonnet F. Ponthenier Nicolas Raynaud E. Rolland G. Romano Loïc Sanchez D. Scevola R. Segaud Paul Stewart Pascal Vivet Marc Zussy