A 336 x 240 Backside-Illuminated 3D-Stacked 7μm SPAD for LiDAR Sensor with PDE 28% at 940nm and under 0.4% Depth Accuracy Up to 10m.

Wonje Park Jaehyung Jang Jongchae Kim Sunho Oh Kyungsu Byun Dahwan Park Jihee Han Hanseung Lee Suhyun Yi Hoonmoo Choi Jongeun Kim Namil Kim Yongtae Gim Minkyu Kim Sangyoung Lee Hansang Kim Eunchang Lee Minsang Yu Jeongjoon Hwang Seunghyun Yoon Kwang Hwangbo Heesang Kim Ahyoung Cho Taejun Baek Sooyoung Park Kwangjun Cho Wonje Park Kyung-Do Kim Hoesam Jeong Hoon Sang Oh Changrock Song A 336 x 240 Backside-Illuminated 3D-Stacked 7μm SPAD for LiDAR Sensor with PDE 28% at 940nm and under 0.4% Depth Accuracy Up to 10m. 1-2 2024 VLSI Technology and Circuits https://doi.org/10.1109/VLSITechnologyandCir46783.2024.10631458 conf/vlsit/2024 db/conf/vlsit/vlsit2024.html#JangKOBPHLYCKKG24 JungChak Ahn Kyungho Lee Yitae Kim Heegeun Jeong Bumsuk Kim Hongki Kim Jongeun Park Taesub Jung Wonje Park Taeheon Lee Eunkyung Park 0003 Sangjun Choi Gyehun Choi Haeyong Park Yujung Choi Seungwook Lee Yunkyung Kim Y. J. Jung Donghyuk Park Seungjoo Nah Youngsun Oh Mihye Kim Yooseung Lee Youngwoo Chung Ihara Hisanori Joon-Hyuk Im Daniel-K J Lee Byunghyun Yim GiDoo Lee Heesang Kown Sungho Choi Jeonsook Lee Dongyoung Jang Youngchan Kim Tae Chan Kim Hiroshige Goto Chi-Young Choi Duckhyung Lee Gab-soo Han 7.1 A 1/4-inch 8Mpixel CMOS image sensor with 3D backside-illuminated 1.12μm pixel with front-side deep-trench isolation and vertical transfer gate. 124-125 2014 ISSCC https://doi.org/10.1109/ISSCC.2014.6757365 conf/isscc/2014 db/conf/isscc/isscc2014.html#AhnLKJKKPJPLPCC14 JungChak Ahn Taejun Baek Kyungsu Byun Ahyoung Cho Kwangjun Cho Chi-Young Choi Gyehun Choi Hoonmoo Choi Sangjun Choi Sungho Choi Yujung Choi Youngwoo Chung Yongtae Gim Hiroshige Goto Gab-soo Han Jihee Han Ihara Hisanori Jeongjoon Hwang Kwang Hwangbo Joon-Hyuk Im Dongyoung Jang Jaehyung Jang Heegeun Jeong Hoesam Jeong Taesub Jung Y. J. Jung Bumsuk Kim Hansang Kim Heesang Kim Hongki Kim Jongchae Kim Jongeun Kim Kyung-Do Kim Mihye Kim Minkyu Kim Namil Kim Tae Chan Kim Yitae Kim Youngchan Kim Yunkyung Kim Heesang Kown Daniel-K J Lee Duckhyung Lee Eunchang Lee GiDoo Lee Hanseung Lee Jeonsook Lee Kyungho Lee Sangyoung Lee Seungwook Lee Taeheon Lee Yooseung Lee Seungjoo Nah Hoon Sang Oh Sunho Oh Youngsun Oh Dahwan Park Donghyuk Park Eunkyung Park 0003 Haeyong Park Jongeun Park Sooyoung Park Changrock Song Suhyun Yi Byunghyun Yim Seunghyun Yoon Minsang Yu