Die-to-Wafer Hybrid Bonding Impact at MM-Wave Frequencies.

Christophe Dubarry Mohammad Alsukour Olivier Valorge Margot Faure Loïc Vincent Victor Milon Pascal Chevalier 0002 Emmanuel Pistono Jean-Daniel Arnould Christophe Dubarry Die-to-Wafer Hybrid Bonding Impact at MM-Wave Frequencies. 1-6 2024 3DIC https://doi.org/10.1109/3DIC63395.2024.10830066 conf/3dic/2024 db/conf/3dic/3dic2024.html#AlsukourVFVM0PA24 A. Divay Olivier Valorge Christophe Dubarry M. Medbouhi Rémi Franiatte Daniel Mermin R. Velard Y. Gobil F. Morisot Erwan Morvan Ismael Charlet Luca Lucci J. Lugo Xavier Garros Hybrid Integration of 3D-RF Interconnects on AlGaN/GaN/Si HEMT RF Transistor featuring 2.2W/mm Psat & 41% PAE @28GHz using a Robust and Cost-Effective Chiplet Heterogeneous Bonding Technique. 1-2 2024 VLSI Technology and Circuits https://doi.org/10.1109/VLSITechnologyandCir46783.2024.10631451 conf/vlsit/2024 db/conf/vlsit/vlsit2024.html#DivayVDMFMVGMMC24 Christophe Dubarry Lucile Arnaud Maria-Luisa Calvo-Muñoz Gaëlle Mauguen Stéphane Moreau R. Crochemore Nicolas Bresson Bernard Aventurier 3D interconnection using copper direct hybrid bonding for GaN on silicon wafer. 1-4 2021 3DIC https://doi.org/10.1109/3DIC52383.2021.9687599 conf/3dic/2021 db/conf/3dic/3dic2021.html#DubarryAMMMCBA21 Emilie Bourjot Paul Stewart Christophe Dubarry E. Lagoutte E. Rolland Nicolas Bresson G. Romano D. Scevola Viorel Balan Jérôme Dechamp Marc Zussy Gaëlle Mauguen Clément Castan Loïc Sanchez Amadine Jouve Frank Fournel Séverine Cheramy Towards a Complete Direct Hybrid Bonding D2W Integration Flow: Known-Good-Dies and Die Planarization Modules Development. 1-5 2019 3DIC https://doi.org/10.1109/3DIC48104.2019.9058783 conf/3dic/2019 db/conf/3dic/3dic2019.html#BourjotSDLRBRSB19 Mohammad Alsukour Lucile Arnaud Jean-Daniel Arnould Bernard Aventurier Viorel Balan Emilie Bourjot Nicolas Bresson Maria-Luisa Calvo-Muñoz Clément Castan Ismael Charlet Séverine Cheramy Pascal Chevalier 0002 R. Crochemore Jérôme Dechamp A. Divay Margot Faure Frank Fournel Rémi Franiatte Xavier Garros Y. Gobil Amadine Jouve E. Lagoutte Luca Lucci J. Lugo Gaëlle Mauguen M. Medbouhi Daniel Mermin Victor Milon Stéphane Moreau F. Morisot Erwan Morvan Emmanuel Pistono E. Rolland G. Romano Loïc Sanchez D. Scevola Paul Stewart Olivier Valorge R. Velard Loïc Vincent Marc Zussy