{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,27]],"date-time":"2026-01-27T22:35:50Z","timestamp":1769553350988,"version":"3.49.0"},"reference-count":63,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2021,1,12]],"date-time":"2021-01-12T00:00:00Z","timestamp":1610409600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>By combining results of adsorption\/desorption measurements on powders and electrical conductivity studies on thick and thin films, the interaction of indium tin oxide with various ambient gas species and carbon monoxide as potential target gas was studied between room temperature and 700 \u00b0C. The results show that the indium tin oxide surfaces exhibit a significant coverage of water-related and carbonaceous adsorbates even at temperatures as high as 600 \u00b0C. Specifically carbonaceous species, which are also produced under carbon monoxide exposure, show a detrimental effect on oxygen adsorption and may impair the film\u2019s sensitivity to a variety of target gases if the material is used in gas sensing applications. Consequently, the operating temperature of an ITO based chemoresistive carbon monoxide sensor should be selected within a range where the decomposition and desorption of these species proceeds rapidly, while the surface oxygen coverage is still high enough to provide ample species for target gas interaction.<\/jats:p>","DOI":"10.3390\/s21020497","type":"journal-article","created":{"date-parts":[[2021,1,12]],"date-time":"2021-01-12T20:11:31Z","timestamp":1610482291000},"page":"497","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":13,"title":["Evaluation of Indium Tin Oxide for Gas Sensing Applications: Adsorption\/Desorption and Electrical Conductivity Studies on Powders and Thick Films"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-4831-7835","authenticated-orcid":false,"given":"Stefan","family":"Dietrich","sequence":"first","affiliation":[{"name":"Fraunhofer Institute for Ceramic Technologies and Systems IKTS, Winterbergstr. 28, 01277 Dresden, Germany"}]},{"given":"Mihails","family":"Kusnezoff","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Ceramic Technologies and Systems IKTS, Winterbergstr. 28, 01277 Dresden, Germany"}]},{"given":"Uwe","family":"Petasch","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Ceramic Technologies and Systems IKTS, Winterbergstr. 28, 01277 Dresden, Germany"}]},{"given":"Alexander","family":"Michaelis","sequence":"additional","affiliation":[{"name":"Institute of Materials Science, Technische Universit\u00e4t Dresden, 01069 Dresden, Germany"}]}],"member":"1968","published-online":{"date-parts":[[2021,1,12]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"121","DOI":"10.1016\/j.vacuum.2016.07.028","article-title":"Fabrication and Characterization of ITO Thin Film Resistance Temperature Detector","volume":"140","author":"Wang","year":"2017","journal-title":"Vacuum"},{"key":"ref_2","first-page":"227","article-title":"Halbleiter-Gassensor Auf Der Basis von Indiumzinnoxid","volume":"39","author":"Wiegleb","year":"1991","journal-title":"Exp. Tech. Der Phys."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"8637","DOI":"10.1016\/j.tsf.2007.03.166","article-title":"A Study on the Microstructure and Gas Sensing Properties of ITO Nanocrystals","volume":"515","author":"Neri","year":"2007","journal-title":"Thin Solid Films"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"630","DOI":"10.1016\/j.snb.2008.12.063","article-title":"In2O3\u2013SnO2 Nano-Toasts and Nanorods: Precipitation Preparation, Formation Mechanism, and Gas Sensitive Properties","volume":"137","author":"Chu","year":"2009","journal-title":"Sens. Actuators B Chem."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"4172","DOI":"10.1007\/s10854-016-4279-x","article-title":"Fabrication and Characterization of Nanostructured Indium Tin Oxide Film and Its Application as Humidity and Gas Sensors","volume":"27","author":"Yadav","year":"2016","journal-title":"J. Mater. Sci. Mater. Electron."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"193","DOI":"10.1016\/0925-4005(94)01247-4","article-title":"Fabrication of Carbon Dioxide Gas Sensor and Its Alarm System Using Indium Tin Oxide (ITO) Thin Films","volume":"21","author":"Patel","year":"1994","journal-title":"Sens. Actuators B Chem."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"216","DOI":"10.1016\/S0925-4005(03)00343-5","article-title":"The Gas Sensing Characteristics of ITO Thin Film Prepared by Sol\u2013Gel Method","volume":"94","author":"Jiao","year":"2003","journal-title":"Sens. Actuators B Chem."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"184","DOI":"10.1016\/S0925-4005(03)00364-2","article-title":"Preparation and Characterization of Proton Implanted Indium Tin Oxide Selective Gas Sensors","volume":"94","author":"Salehi","year":"2003","journal-title":"Sens. Actuators B Chem."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"349","DOI":"10.1016\/0040-6090(90)90150-C","article-title":"Reactively Sputtered Indium Tin Oxide Polycrystalline Thin Films as NO and NO2 Gas Sensors","volume":"186","author":"Sberveglieri","year":"1990","journal-title":"Thin Solid Films"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"500","DOI":"10.1016\/j.msec.2005.10.037","article-title":"Screen-Printed Tin-Doped Indium Oxide (ITO) Films for NH3 Gas Sensing","volume":"26","author":"Mbarek","year":"2006","journal-title":"Mater. Sci. Eng. C"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"235","DOI":"10.1016\/0250-6874(88)87013-6","article-title":"Radio Frequency Magnetron Sputtering Growth and Characterization of Indium-Tin Oxide (ITO) Thin Films for NO2 Gas Sensors","volume":"15","author":"Sberveglieri","year":"1988","journal-title":"Sens. Actuators"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"781","DOI":"10.1016\/S0257-8972(01)01107-0","article-title":"ITO-Film Gas Sensor for Measuring Photodecomposition of NO2 Gas","volume":"142-144","author":"Sako","year":"2001","journal-title":"Surf. Coat. Technol."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"68","DOI":"10.1016\/j.tsf.2005.04.022","article-title":"NO2-Gas-Sensing Properties of Mixed In2O3\u2013SnO2 Thin Films","volume":"490","author":"Forleo","year":"2005","journal-title":"Thin Solid Films"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"94","DOI":"10.1016\/j.tsf.2005.04.006","article-title":"Indium Tin Oxide Thin Film Gas Sensors for Detection of Ethanol Vapours","volume":"490","author":"Vaishnav","year":"2005","journal-title":"Thin Solid Films"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"180","DOI":"10.1016\/S0925-4005(02)00461-6","article-title":"Effects of Crystal Structures on Gas Sensing Properties of Nanocrystalline ITO Thick Films","volume":"89","author":"Kim","year":"2003","journal-title":"Sens. Actuators B Chem."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"192","DOI":"10.1016\/j.proeng.2012.09.116","article-title":"Impedance Spectroscopy Study of Porous ITO Based Gas Sensor","volume":"47","author":"Madhi","year":"2012","journal-title":"Procedia Eng."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"31","DOI":"10.1016\/S0925-4005(03)00335-6","article-title":"Three Electrodes Gas Sensor Based on ITO Thin Film","volume":"93","author":"Lee","year":"2003","journal-title":"Sens. Actuators B Chem."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"180","DOI":"10.1016\/S0925-4005(03)00524-0","article-title":"Indium Tin Oxide (ITO) Thin Film Gas Sensor for Detection of Methanol at Room Temperature","volume":"96","author":"Patel","year":"2003","journal-title":"Sens. Actuators B Chem."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"381","DOI":"10.1016\/j.snb.2014.07.037","article-title":"Development of ITO Thin Film Sensor for Detection of Benzene","volume":"206","author":"Vaishnav","year":"2015","journal-title":"Sens. Actuators B Chem."},{"key":"ref_20","unstructured":"Dietrich, S. (2018). Funktionale Schichten f\u00fcr Gassensorische Anwendungen. [Ph.D. Thesis, Technische Universit\u00e4t Dresden, Department of Materials Science and Engineering]."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"335","DOI":"10.1016\/0039-6028(79)90411-4","article-title":"Interactions of Tin Oxide Surface with O2, H2O and H2","volume":"86","author":"Yamazoe","year":"1979","journal-title":"Surf. Sci."},{"key":"ref_22","unstructured":"Wiche, G. (2007). Metalloxid-Gassensoren Mit Siliziumcarbid Micro-Hotplate. [Ph.D. Thesis, Technische Universit\u00e4t Berlin]."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"2041","DOI":"10.1002\/cphc.200600292","article-title":"Interplay between O2 and SnO2: Oxygen Ionosorption and Spectroscopic Evidence for Adsorbed Oxygen","volume":"7","author":"Gurlo","year":"2006","journal-title":"ChemPhysChem"},{"key":"ref_24","unstructured":"Anand, M. (2005). Study of Tin Oxide for Hydrogen Gas Sensor Applications. [Ph.D. Thesis, University of South Florida]."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"1321","DOI":"10.1016\/j.ceramint.2013.07.012","article-title":"Morphological, Structural, and Gas-Sensing Characterization of Tin-Doped Indium Oxide Nanoparticles","volume":"40","author":"Ayeshamariam","year":"2014","journal-title":"Ceram. Int."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"358","DOI":"10.1007\/BF02390220","article-title":"Chemisorption of CO2 at Oxide Electrodes in the Presence of Oxygen and Water","volume":"1","author":"Dobrovolsky","year":"1995","journal-title":"Ionics"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"329","DOI":"10.1016\/0250-6874(81)80054-6","article-title":"Semiconductor Gas Sensors","volume":"2","author":"Morrison","year":"1981","journal-title":"Sens. Actuators"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"206","DOI":"10.1016\/j.mseb.2017.12.036","article-title":"Semiconductor Metal Oxide Gas Sensors: A Review","volume":"229","author":"Dey","year":"2018","journal-title":"Mater. Sci. Eng. B"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"47","DOI":"10.1016\/j.progsurf.2005.09.002","article-title":"The Surface and Materials Science of Tin Oxide","volume":"79","author":"Batzill","year":"2005","journal-title":"Prog. Surf. Sci."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"3826","DOI":"10.1002\/anie.200602597","article-title":"In Situ and Operando Spectroscopy for Assessing Mechanisms of Gas Sensing","volume":"46","author":"Gurlo","year":"2007","journal-title":"Angew. Chem. Int. Ed."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"284","DOI":"10.1016\/j.susc.2018.08.003","article-title":"Investigation of Gas Sensing Mechanism of SnO2 Based Chemiresistor Using near Ambient Pressure XPS","volume":"677","author":"Vorokhta","year":"2018","journal-title":"Surf. Sci."},{"key":"ref_32","unstructured":"Sachlara, O. (2005). Impedanzspektroskopie an SnO2-Dickschicht-Sensoren. [Ph.D. Thesis, Eberhard-Karls-Universit\u00e4t T\u00fcbingen]."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"525","DOI":"10.1016\/j.snb.2015.03.067","article-title":"Indium-Tin-Oxide Single-Nanowire Gas Sensor Fabricated via Laser Writing and Subsequent Etching","volume":"215","author":"Afshar","year":"2015","journal-title":"Sens. Actuators B Chem."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"115","DOI":"10.1016\/0925-4005(94)87009-8","article-title":"CO and CO2 Thin-Film SnO2 Gas Sensors on Si Substrates","volume":"22","author":"Hoefer","year":"1994","journal-title":"Sens. Actuators B Chem."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"809","DOI":"10.1111\/j.1551-2916.2011.04999.x","article-title":"Determination of the Solubility of Tin in Indium Oxide Using In Situ and Ex Situ X-Ray Diffraction","volume":"95","author":"Mason","year":"2012","journal-title":"J. Am. Ceram. Soc."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"195","DOI":"10.1016\/0040-6090(76)90439-9","article-title":"Surface States on Thin SiO2 Layers Induced by Oxygen Adsorption","volume":"36","author":"Jakowski","year":"1976","journal-title":"Thin Solid Films"},{"key":"ref_37","unstructured":"Doremus, R.H. (1994). Glass Science, A Wiley-Interscience Publication; Wiley. [2nd ed.]."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"1303","DOI":"10.1088\/0022-3727\/33\/11\/309","article-title":"Atomic Oxygen Recombination on Fused Silica: Modelling and Comparison to Low-Temperature Experiments (300 K)","volume":"33","author":"Cartry","year":"2000","journal-title":"J. Phys. D Appl. Phys."},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"222","DOI":"10.1016\/j.apcatb.2012.05.047","article-title":"Supported Gold Catalysts for the Total Oxidation of Volatile Organic Compounds","volume":"125","author":"Liotta","year":"2012","journal-title":"Appl. Catal. B Environ."},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"270","DOI":"10.1016\/j.cattod.2015.10.040","article-title":"Low-Temperature Catalysis for VOCs Removal in Technology and Application: A State-of-the-Art Review","volume":"264","author":"Zhang","year":"2016","journal-title":"Catal. Today"},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"439","DOI":"10.1016\/j.jiec.2016.12.018","article-title":"Catalytic Combustion of Volatile Organic Compound over Spherical-Shaped Copper\u2013Manganese Oxide","volume":"47","author":"Ahn","year":"2017","journal-title":"J. Ind. Eng. Chem."},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"72","DOI":"10.1016\/S0040-6090(98)00521-5","article-title":"Dependence of Oxygen Flow on Optical and Electrical Properties of DC-Magnetron Sputtered ITO Films","volume":"326","author":"Bender","year":"1998","journal-title":"Thin Solid Films"},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"2631","DOI":"10.1063\/1.367025","article-title":"Tin Doped Indium Oxide Thin Films: Electrical Properties","volume":"83","author":"Tahar","year":"1998","journal-title":"J. Appl. Phys."},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"4094","DOI":"10.1016\/j.tsf.2009.01.181","article-title":"Process Development of ITO Source\/Drain Electrode for the Top-Gate Indium\u2013Gallium\u2013Zinc Oxide Transparent Thin-Film Transistor","volume":"517","author":"Cheong","year":"2009","journal-title":"Thin Solid Films"},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"4125","DOI":"10.1021\/j150626a034","article-title":"Temperature Programmed Desorption Study of Water Adsorbed on Metal Oxides. 2. Tin Oxide Surfaces","volume":"85","author":"Egashira","year":"1981","journal-title":"J. Phys. Chem."},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"2711","DOI":"10.1063\/1.340964","article-title":"Electrical and Optical Properties of Indium Tin Oxide Thin Films Prepared on Low-temperature Substrates by Rf Magnetron Sputtering under an Applied External Magnetic Field","volume":"63","author":"Nanto","year":"1988","journal-title":"J. Appl. Phys."},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"123","DOI":"10.1016\/S0040-6090(97)00173-9","article-title":"ITO Surface Ball Formation Induced by Atomic Hydrogen in PECVD and HW-CVD Tools","volume":"304","author":"Lan","year":"1997","journal-title":"Thin Solid Films"},{"key":"ref_48","doi-asserted-by":"crossref","first-page":"034501","DOI":"10.1063\/1.2958323","article-title":"Formation of Metallic Indium-Tin Phase from Indium-Tin-Oxide Nanoparticles under Reducing Conditions and Its Influence on the Electrical Properties","volume":"104","author":"Guenther","year":"2008","journal-title":"J. Appl. Phys."},{"key":"ref_49","doi-asserted-by":"crossref","first-page":"249","DOI":"10.1007\/BF02375953","article-title":"Behaviour of a Dense In2O3\/ YSZ Electrode in Oxygen Containing Atmospheres","volume":"4","author":"Bronin","year":"1998","journal-title":"Ionics"},{"key":"ref_50","unstructured":"S\u00e4nze, S. (2014). Synthese, Charakterisierung Und in Situ Spektroskopische Studie Des Ethanol- Gassensormechanismus von Indiumoxid. [Ph.D. thesis, Technische Universit\u00e4t Darmstadt]."},{"key":"ref_51","doi-asserted-by":"crossref","first-page":"325","DOI":"10.1016\/S0925-4005(97)80090-1","article-title":"Indium Oxide-Based Gas Sensor for Selective Detection of CO","volume":"36","author":"Yamaura","year":"1996","journal-title":"Sens. Actuators B Chem."},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"71","DOI":"10.1016\/0250-6874(89)87026-X","article-title":"Surface Processes in the Detection of Reducing Gases with SnO2-Based Devices","volume":"18","author":"Kohl","year":"1989","journal-title":"Sens. Actuators"},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"51","DOI":"10.1016\/j.snb.2007.05.028","article-title":"The Nature of Processes Controlling the Kinetics of Indium Oxide-Based Thin Film Gas Sensor Response","volume":"128","author":"Korotcenkov","year":"2007","journal-title":"Sens. Actuators B Chem."},{"key":"ref_54","doi-asserted-by":"crossref","first-page":"450","DOI":"10.1021\/la011101t","article-title":"Characterization of Indium-Tin Oxide Interfaces Using X-Ray Photoelectron Spectroscopy and Redox Processes of a Chemisorbed Probe Molecule: Effect of Surface Pretreatment Conditions","volume":"18","author":"Donley","year":"2002","journal-title":"Langmuir"},{"key":"ref_55","doi-asserted-by":"crossref","first-page":"225","DOI":"10.1016\/S0167-5729(96)00007-6","article-title":"Surface Chemistry of Carbon Dioxide","volume":"25","author":"Freund","year":"1996","journal-title":"Surf. Sci. Rep."},{"key":"ref_56","doi-asserted-by":"crossref","first-page":"73","DOI":"10.1016\/j.snb.2015.12.025","article-title":"CO2 -Sensing Properties and Mechanism of Nano-SnO2 Thick-Film Sensor","volume":"227","author":"Wang","year":"2016","journal-title":"Sens. Actuators B Chem."},{"key":"ref_57","doi-asserted-by":"crossref","unstructured":"Iwata, T., Matsuda, K., Takahashi, K., and Kazuaki, S. (2017). CO2 Sensing Characteristics of a La2O3\/SnO2 Stacked Structure with Micromachined Hotplates. Sensors, 17.","DOI":"10.3390\/s17092156"},{"key":"ref_58","doi-asserted-by":"crossref","first-page":"259","DOI":"10.1016\/S0169-4332(03)00617-2","article-title":"Surface Chemistry of Carbon Removal from Indium Tin Oxide by Base and Plasma Treatment, with Implications on Hydroxyl Termination","volume":"218","author":"Chaney","year":"2003","journal-title":"Appl. Surf. Sci."},{"key":"ref_59","doi-asserted-by":"crossref","first-page":"1731","DOI":"10.1016\/j.orgel.2014.05.008","article-title":"Work Function Changes of Plasma Treated Indium Tin Oxide","volume":"15","author":"He","year":"2014","journal-title":"Org. Electron."},{"key":"ref_60","doi-asserted-by":"crossref","first-page":"7135","DOI":"10.1016\/j.apsusc.2012.03.188","article-title":"Atmospheric Pressure Diffuse Plasma in Ambient Air for ITO Surface Cleaning","volume":"258","author":"Homola","year":"2012","journal-title":"Appl. Surf. Sci."},{"key":"ref_61","doi-asserted-by":"crossref","first-page":"188","DOI":"10.1016\/j.susc.2015.10.026","article-title":"The Oxidation and Surface Speciation of Indium and Indium Oxides Exposed to Atmospheric Oxidants","volume":"648","author":"Detweiler","year":"2016","journal-title":"Surf. Sci."},{"key":"ref_62","doi-asserted-by":"crossref","first-page":"452","DOI":"10.1016\/0016-2361(95)93481-R","article-title":"Kinetics of NO Reduction by CO on Quartz Glass Surfaces","volume":"74","author":"Berger","year":"1995","journal-title":"Fuel"},{"key":"ref_63","doi-asserted-by":"crossref","first-page":"1531","DOI":"10.1063\/1.1699292","article-title":"Effects of Electronic Charge Transfer between Adsorbate and Solid on Chemisorption and Catalysis","volume":"21","author":"Weisz","year":"1953","journal-title":"J. Chem. Phys."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/2\/497\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T05:10:06Z","timestamp":1760159406000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/2\/497"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,1,12]]},"references-count":63,"journal-issue":{"issue":"2","published-online":{"date-parts":[[2021,1]]}},"alternative-id":["s21020497"],"URL":"https:\/\/doi.org\/10.3390\/s21020497","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021,1,12]]}}}