{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,5]],"date-time":"2026-03-05T22:57:29Z","timestamp":1772751449417,"version":"3.50.1"},"reference-count":16,"publisher":"MDPI AG","issue":"17","license":[{"start":{"date-parts":[[2019,9,3]],"date-time":"2019-09-03T00:00:00Z","timestamp":1567468800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>MEMS-based skin friction sensors are used to measure and validate skin friction and its distribution, and their advantages of small volume, high reliability, and low cost make them very important for vehicle design. Aiming at addressing the accuracy problem of skin friction measurements induced by existing errors of sensor fabrication and assembly, a novel fabrication technology based on visual alignment is presented. Sensor optimization, precise fabrication of key parts, micro-assembly based on visual alignment, prototype fabrication, static calibration and validation in a hypersonic wind tunnel are implemented. The fabrication and assembly precision of the sensor prototypes achieve the desired effect. The results indicate that the sensor prototypes have the characteristics of fast response, good stability and zero-return; the measurement ranges are 0\u2013100 Pa, the resolution is 0.1 Pa, the repeatability accuracy and linearity are better than 1%, the repeatability accuracy in laminar flow conditions is better than 2% and it is almost 3% in turbulent flow conditions. The deviations between the measured skin friction coefficients and numerical solutions are almost 10% under turbulent flow conditions; whereas the deviations between the measured skin friction coefficients and the analytical values are large (even more than 100%) under laminar flow conditions. The error resources of direct skin friction measurement and their influence rules are systematically analyzed.<\/jats:p>","DOI":"10.3390\/s19173803","type":"journal-article","created":{"date-parts":[[2019,9,3]],"date-time":"2019-09-03T03:06:14Z","timestamp":1567479974000},"page":"3803","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["Fabrication and Hypersonic Wind Tunnel Validation of a MEMS Skin Friction Sensor Based on Visual Alignment Technology"],"prefix":"10.3390","volume":"19","author":[{"given":"Xiong","family":"Wang","sequence":"first","affiliation":[{"name":"Hypervelocity Aerodynamics Institute, China Aerodynamics Research and Development Center (CARDC), Mianyang 621000, China"}]},{"given":"Nantian","family":"Wang","sequence":"additional","affiliation":[{"name":"Hypervelocity Aerodynamics Institute, China Aerodynamics Research and Development Center (CARDC), Mianyang 621000, China"}]},{"given":"Xiaobin","family":"Xu","sequence":"additional","affiliation":[{"name":"Hypervelocity Aerodynamics Institute, China Aerodynamics Research and Development Center (CARDC), Mianyang 621000, China"}]},{"given":"Tao","family":"Zhu","sequence":"additional","affiliation":[{"name":"Hypervelocity Aerodynamics Institute, China Aerodynamics Research and Development Center (CARDC), Mianyang 621000, China"}]},{"given":"Yang","family":"Gao","sequence":"additional","affiliation":[{"name":"College of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China"}]}],"member":"1968","published-online":{"date-parts":[[2019,9,3]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Meritt, R.J., and Schetz, J.A. (2014, January 28\u201330). Skin friction sensor for high-speed, high-enthalpy scramjet flow applications. Proceedings of the 50th AIAA\/ASME\/SAE\/ASEE Joint Propulsion Conference, Cleveland, OH, USA.","DOI":"10.2514\/6.2014-3942"},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Meritt, R.J., Schetz, J.A., and Eric, C. (2015, January 5\u20139). Direct measurements of skin friction at AEDC hypervelocity wind tunnel 9. Proceedings of the 53rd AIAA Aerospace Sciences Meeting, Kissimmee, FL, USA.","DOI":"10.2514\/6.2015-1914"},{"key":"ref_3","first-page":"81","article-title":"Direct measurement of skin friction at hypersonic shock tunnel","volume":"27","author":"Lv","year":"2013","journal-title":"J. Exp. Fluid Mech."},{"key":"ref_4","first-page":"83","article-title":"Direct measurement of skin friction for hypersonic flight vehicle","volume":"25","author":"Ma","year":"2011","journal-title":"J. Exp. Fluid Mech."},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Schetz, J.A. (2010, January 4\u20137). Direct measurement of skin friction in complex flows. Proceedings of the 48th AIAA Aerospace Sciences Meeting, Orlando, FL, USA.","DOI":"10.2514\/6.2010-44"},{"key":"ref_6","unstructured":"Jiang, Z., Farmer, K.R., and Vijay, M. (2001, January 21\u201325). A MEMS device for measurement of skin friction with capacitive sensing. Proceedings of the Microelectromechanical Systems Conference, Interlaken, Switzerland."},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Meloy, J., Griffin, J., Sells, J., Cattafesta, L., Sheplak, M., and Chandrasekharan, V. (2011, January 27\u201330). Experimental verification of a MEMS based skin friction sensor for quantitative wall shear stress measurement. Proceedings of the 41st AIAA Fluid Dynamics Conference and Exhibit, Honolulu, HI, USA.","DOI":"10.2514\/6.2011-3995"},{"key":"ref_8","unstructured":"Wang, X., Zhu, T., Fan, X., Zhang, D., Xu, X., and Shi, Y. (2017). A MEMS Skin Friction Sensor and Its Fabrication Method. (201418003582.X), (In Chinese)."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"3601","DOI":"10.1007\/s00542-016-3185-8","article-title":"Fabrication, calibration and proof experiments in hypersonic wind tunnel for a novel MEMS skin friction sensor","volume":"23","author":"Wang","year":"2017","journal-title":"Microsyst. Technol."},{"key":"ref_10","first-page":"1068","article-title":"Vibration frequency analytical formula and parameter sensitivity analysis for rocking mass gyroscope","volume":"317","author":"Wang","year":"2011","journal-title":"Adv. Mater. Res."},{"key":"ref_11","unstructured":"Wang, X. (2012). Study on Key Technologies of Rocking Mass Micro-Gyroscope. [Ph.D. Thesis, National University of Defense Technology]. (In Chinese)."},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Meritt, R.J., Donbar, M.J., Molinaro, J.N., and Schetz, J.A. (2015, January 5\u20139). Error source studies of direct measurement skin friction sensors. Proceedings of the 53rd AIAA Aerospace Sciences Meeting, Kissimmee, FL, USA.","DOI":"10.2514\/6.2015-1916"},{"key":"ref_13","first-page":"1671","article-title":"Nighttime lane markings detection based on Canny operator and Hough transform","volume":"16","author":"Li","year":"2016","journal-title":"Sci. Technol. Eng."},{"key":"ref_14","unstructured":"Grady, O.A. (2011). Development of a MEMS Sensor for Sub-Kpa Shear Stress Measurements. [Ph.D. Thesis, Columbia University]."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"163","DOI":"10.2514\/3.2815","article-title":"Measurement of errors caused by misalignment of floating element skin friction balances","volume":"3","author":"Westkaemper","year":"1965","journal-title":"AIAA J."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"197","DOI":"10.1115\/1.3448523","article-title":"Experimental study of error sources in skin friction balance measurements","volume":"99","author":"Allen","year":"1977","journal-title":"ASME Trans. Ser. I J. Fluids Eng."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/17\/3803\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T13:16:16Z","timestamp":1760188576000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/19\/17\/3803"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,9,3]]},"references-count":16,"journal-issue":{"issue":"17","published-online":{"date-parts":[[2019,9]]}},"alternative-id":["s19173803"],"URL":"https:\/\/doi.org\/10.3390\/s19173803","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2019,9,3]]}}}