{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,13]],"date-time":"2026-04-13T15:34:21Z","timestamp":1776094461251,"version":"3.50.1"},"reference-count":45,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2019,3,22]],"date-time":"2019-03-22T00:00:00Z","timestamp":1553212800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>During the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes their metrological properties for fast roughness and shape measurements including noise, damping, tip form, tip wear, and probing forces and presents the first results on the measurement of mechanical surface parameters. Due to the small mass of the cantilever microprobes, roughness measurements at very high traverse speeds up to 15 mm\/s are possible. At these high scanning speeds, considerable wear of the integrated silicon tips was observed in the past. In this paper, a new tip-testing artefact with rectangular grooves of different width was used to measure this wear and to measure the tip shape, which is needed for morphological filtering of the measured profiles and, thus, for accurate form measurements. To reduce tip wear, the integrated silicon tips were replaced by low-wear spherical diamond tips of a 2 \u00b5m radius. Currently, a compact microprobe device with an integrated feed-unit is being developed for high-speed roughness measurements on manufacturing machines. First measurements on sinusoidal artefacts were carried out successfully. Moreover, the first measurements of the elastic modulus of a polymer surface applying the contact resonance measurement principle are presented, which indicates the high potential of these microprobes for simultaneous high-speed roughness and mechanical parameter measurements.<\/jats:p>","DOI":"10.3390\/s19061410","type":"journal-article","created":{"date-parts":[[2019,3,25]],"date-time":"2019-03-25T06:56:52Z","timestamp":1553497012000},"page":"1410","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":19,"title":["Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 \u00b5m"],"prefix":"10.3390","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4293-4982","authenticated-orcid":false,"given":"Uwe","family":"Brand","sequence":"first","affiliation":[{"name":"Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, Germany"}]},{"given":"Min","family":"Xu","sequence":"additional","affiliation":[{"name":"Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2948-5641","authenticated-orcid":false,"given":"Lutz","family":"Doering","sequence":"additional","affiliation":[{"name":"Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, Germany"}]},{"given":"Jannick","family":"Langfahl-Klabes","sequence":"additional","affiliation":[{"name":"Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, Germany"}]},{"given":"Heinrich","family":"Behle","sequence":"additional","affiliation":[{"name":"Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, Germany"}]},{"given":"Sebastian","family":"B\u00fctefisch","sequence":"additional","affiliation":[{"name":"Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, Germany"}]},{"given":"Thomas","family":"Ahbe","sequence":"additional","affiliation":[{"name":"Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5801-813X","authenticated-orcid":false,"given":"Erwin","family":"Peiner","sequence":"additional","affiliation":[{"name":"Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, Hans-Sommer-Stra\u00dfe 66, D-38106 Braunschweig, Germany"},{"name":"Laboratory for Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, Langer Kamp 6, D-38106 Braunschweig, Germany"}]},{"given":"Stefan","family":"V\u00f6llmeke","sequence":"additional","affiliation":[{"name":"CiS Forschungsinstitut f\u00fcr Mikrosensorik GmbH, Konrad-Zuse-Stra\u00dfe 14, D-99099 Erfurt, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2794-2271","authenticated-orcid":false,"given":"Thomas","family":"Frank","sequence":"additional","affiliation":[{"name":"CiS Forschungsinstitut f\u00fcr Mikrosensorik GmbH, Konrad-Zuse-Stra\u00dfe 14, D-99099 Erfurt, Germany"}]},{"given":"Bodo","family":"Mickan","sequence":"additional","affiliation":[{"name":"Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, Germany"}]},{"given":"Ilia","family":"Kiselev","sequence":"additional","affiliation":[{"name":"Breitmeier Messtechnik GmbH, Englerstr. 24, D-76275 Ettlingen, Germany"}]},{"given":"Michael","family":"Hauptmannl","sequence":"additional","affiliation":[{"name":"Breitmeier Messtechnik GmbH, Englerstr. 24, D-76275 Ettlingen, Germany"}]},{"given":"Michael","family":"Drexel","sequence":"additional","affiliation":[{"name":"Breitmeier Messtechnik GmbH, Englerstr. 24, D-76275 Ettlingen, Germany"}]}],"member":"1968","published-online":{"date-parts":[[2019,3,22]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"121912","DOI":"10.1063\/1.2786881","article-title":"Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures","volume":"91","author":"Dai","year":"2007","journal-title":"Appl. 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